Abstract
Gallium arsenide was deposited by metal organic chemical vapor deposition in a horizontal quartz reactor tube using trimethylgallium and arsine at 400oC - 500oC. Nucleation time and deposition rate were monitored using in situ laser reflectometry. This allowed differentiation between film and parasitic growth, which was not possible with other optical techniques. An absolute reflectance model was developed using measurements prior to GaAs deposition, and then employed to calculate values for GaAs on quartz. Detected reflectance intensities during experimental GaAs deposition were low compared to the model due to 3-dimensional island growth, causing scattering of the incident laser radiation.
Disciplines
Analytical Chemistry | Chemistry | Electronic Devices and Semiconductor Manufacturing | Materials Chemistry | Materials Science and Engineering | Optics | Other Engineering Science and Materials | Other Environmental Sciences | Other Materials Science and Engineering | Other Physics | Physical Chemistry | Physics | Process Control and Systems | Structural Materials | Sustainability | Thermodynamics
Recommended Citation
Clayton, A.J. and Irvine, S.J.C. (2011) ‘Absolute Laser Reflectance During Optical Monitoring of Polycrystalline GaAs Deposition on Quartz Using Metalorganic Chemical Vapor Deposition’. Journal of Electronic Materials, 40(6), 1437-1443
Digital Commons Citation
Clayton, A.J. and Irvine, S.J.C. (2011) ‘Absolute Laser Reflectance During Optical Monitoring of Polycrystalline GaAs Deposition on Quartz Using Metalorganic Chemical Vapor Deposition’. Journal of Electronic Materials, 40(6), 1437-1443
Included in
Analytical Chemistry Commons, Electronic Devices and Semiconductor Manufacturing Commons, Materials Chemistry Commons, Optics Commons, Other Engineering Science and Materials Commons, Other Environmental Sciences Commons, Other Materials Science and Engineering Commons, Other Physics Commons, Physical Chemistry Commons, Process Control and Systems Commons, Structural Materials Commons, Sustainability Commons, Thermodynamics Commons
Comments
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This is the author’s final version after peer review. The published version can be assessed by following this link http://dx.doi.org/10.1007/s11664-011-1540-1 or at http://www.springerlink.com/content/f649815506316138/